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Analytical Equipment Product List

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Atmospheric Pressure Ionization Mass Spectrometer 'API-MS'

Atmospheric Pressure Ionization Mass Spectrometer 'API-MS'

Support for high-purity gas purification technology and trace gas impurity measurement technology!

Our company supports high-purity gas purification technology and trace gas impurity measurement technology using 'API-MS' in the fields of semiconductor manufacturing, organic EL manufacturing, and advanced research. As for our track record in piping construction, we have gas supply equipment for the next-generation detector XMASS at Kamioka and a gas sampling system for JAXA's Hayabusa II return chamber. Additionally, the 'API-MS' method has been registered with ISO as a high-sensitivity gas permeability evaluation device for films. *For more details, please download the PDF or contact us.

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High-sensitivity gas analysis device "FLEX-MS Series"

High-sensitivity gas analysis device "FLEX-MS Series"

Continuous measurement of impurities in gas can be performed within 1 minute per cycle! Being portable, it allows for measurement at the point of use.

The "FLEX-MS Series" is a high-sensitivity gas analysis device that uses atmospheric pressure ionization mass spectrometry (API method). It can measure impurities (mass numbers 3 to 400) in high-purity gases at the ppb level. Impurities can be measured in the range of 10 ppb to 0.1 ppb. The power supply operates at AC100V. 【Features】 ■ Direct introduction of the target gas is possible ■ Impurities can be measured in the range of 10 ppb to 0.1 ppb ■ Time variation measurements can be performed with concentration display using registered calibration curves ■ Portable type allows for measurements at the point of use ■ Operates on AC100V power supply *For more details, please refer to the PDF document or feel free to contact us.

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